Timeline

1978

Founded by SERC as the Sheffield III-V Facility, founded by Prof Peter Neville Robson

1979

First MOVPE reactor Cambridge Instruments MR100 installed

1983

First MBE VG Semicon V80-1 reactor installed

1985

MBE VG Semicon V80-2 reactor installed

1989

MOVPE reactor Cambridge Instruments Quantax 235 installed

1990

MOVPE reactor Metal Research MR350 installed

1993

MOVPE reactor Thomas Swan Gallium Nitride 1 CCS installed

1993

Prof Colin Whitehouse appointed as Director

2002

MBE reactor VG Semicon V90-1 installed

2003

Prof Peter Houston appointed as Director

2004

MOVPE Thomas Swan CCS Robot Loader 7×2 installed in Sheffield

2006

Facility moves to the new Nanoscience and Technology Centre in Sheffield

2010

University of Cambridge joins the National Epitaxy Facility

2011

MBE reactor VG Semicon V90-2 installed in Sheffield

2013

Professor Jon Heffernan appointed as Director

2014

ISO:9001 certification awarded

2014

Cambridge Facility moves to new Department of Materials Science and Metallurgy Building at West Cambridge

2016

MOVPE Aixtron CCS Gallium Nitride (GaN) 2 reactor installed in Sheffield

2017

MOVPE Veeco reactor installed in Cambridge

2018

MOVPE Aixtron CCS 3×2 JR (John Roberts) reactor installed in Sheffield

2018

MBE DCA Cluster Tool for advanced materials discovery and integration installed in Sheffield

2020

MBE Veeco GEN 930 III-V reactor installed at UCL

2022

MOVPE Aixtron CCS 3×2 PH (Peter Houston) reactor installed in Sheffield

2023

Installation of Micro-Transfer Printing Tool for Heterogeneous Integration in Sheffield

2023

Technician David Morris achieves his 40th work anniversary at the University of Sheffield

2023

National Epitaxy Facility quoted in the National Semiconductor Strategy as key support 

2025

Prof Rachel Oliver awarded an OBE for her services to Materials Engineering

2025

Grant awarded for a new MBE double-chamber system in Sheffield, installation in 2026