Micro-Transfer Print Tool addition at the National Epitaxy Facility
We are delighted to announce that a commercial Micro-Transfer Print (MTP) Tool from ASMPT Amicra, a worldwide leading supplier of high precision pick-and-place systems, has been commissioned at the EPSRC National Epitaxy Facility’s headquarters in Sheffield!
The tool enables a highly-accurate, large-scale, parallel transfer of devices from a source to a target wafer of up to 6″ with:
- ±1µm XY placement accuracy
- Full-cycle transfer time of under 60s
- Up to 17 x 17 mm PDMS stamp area
The MTP system introduces a new capability to the Facility and will enable us to work on heterogeneous integration of III-V opto-electronic devices on silicon, where there is an ever growing national demand. The tool installed in Sheffield is one of the first industrial MTP systems in the UK, and we already have a lot of interest from potential users. Over the next few months we will be developing our micro-transfer printing processes so that we can offer them as a service to the R&D semiconductor community in the near future.
