New MOVPE reactor commissioned within the National Epitaxy Facility
A new MOVPE (Metal Organic Vapour Phase Epitaxy) reactor has been commissioned at the National Epitaxy Facility’s headquarters at the University of Sheffield in August 2022.
The installation/commissioning process was delayed due to COVID-related issues. However, the supplier, Aixtron, has used this opportunity to redesign the reactor’s exhaust system in collaboration with our experienced staff to make its maintenance easier and to minimise the internal material deposition.
Following the training of our new MOVPE grower, Dr Nick Bailey, and further optimization of epitaxial parameters, the new reactor is currently used for our ongoing microcavity projects, including optimisation of narrow line-width InGaAs quantum wells and strain-balanced InGaP distributed Bragg reflectors.
Dr Nick Bailey and the new MOVPE reactor